Description - Contamination-Free Manufacturing for Semiconductors and Other Precision Products by Robert P. Donovan
This study recognizes the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology. It provides in-depth and advanced treatment on the origins, procedures and disposal of a variety of contaminants and ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS).
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